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aj499V6MX
541 Vistas, 5 Respuestas

How to fix disjoints to fill a drawing to be used for lithography

The attached picture is my microfluidic device and I have to develop this pattern on a silicon wafer using a maskless aligner. But for doing that I need to fill the channels inside it, and when I am doing it with hatch command there are lots of gaps being found in the drawing. I tried correcting it with AutoConstrain but it still does not work. I have attached the errors I am receiving while using hatch and the other image depicts the places where it finds gap. I have tried to manually also correct the disjoints but then when I run hatch command it shows disjoints somewhere else and it becomes a never ending process. Does someone has any suggestions for this?

 

Design

 

aj499V6MX_0-1715896469937.png

 

Error: 

aj499V6MX_1-1715896485745.png

 

aj499V6MX_2-1715896520481.png