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How to fix disjoints to fill a drawing to be used for lithography

aj499V6MX
Explorer

How to fix disjoints to fill a drawing to be used for lithography

aj499V6MX
Explorer
Explorer

The attached picture is my microfluidic device and I have to develop this pattern on a silicon wafer using a maskless aligner. But for doing that I need to fill the channels inside it, and when I am doing it with hatch command there are lots of gaps being found in the drawing. I tried correcting it with AutoConstrain but it still does not work. I have attached the errors I am receiving while using hatch and the other image depicts the places where it finds gap. I have tried to manually also correct the disjoints but then when I run hatch command it shows disjoints somewhere else and it becomes a never ending process. Does someone has any suggestions for this?

 

Design

 

aj499V6MX_0-1715896469937.png

 

Error: 

aj499V6MX_1-1715896485745.png

 

aj499V6MX_2-1715896520481.png

 

 

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Soluciones aceptadas (1)
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5 Respuestas
Respuestas (5)

Washingtonn
Collaborator
Collaborator

A possible solution may be to use the PLINE command instead. Draw a polyline midway between the channel objects and apply the appropriate thicknesses as needed.  Where polylines won't work, create closed objects and fill with hatches separately as needed. Rough example shown below.

Washingtonn_0-1715899417313.png

 

Kent1Cooper
Consultant
Consultant
Solución aceptada

You don't say whether you've tried all the suggestions in that error message.  What have you tried for connecting at the gaps?  If that is made up of only Lines, Arcs and Polylines, try PEDIT, the Multiple option, select everything, the Join option with a fuzz factor [which the JOIN command doesn't have] large enough to find ends close enough to connect.

 

Another possibility:  Are you doing the HATCH by picking inside areas, or by selection bounding objects?  Try the other approach.

Kent Cooper, AIA

pendean
Community Legend
Community Legend

@aj499V6MX wrote:

The attached picture is my microfluidic device...


Share the actual DWG file here please.

TheCADnoob
Mentor
Mentor

If you share your drawing we may be able to identify the reasons. 

 

Have you tried selecting everything and using the OVERKILL command?

CADnoob

EESignature

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AnwarkhanSAD5F
Community Visitor
Community Visitor

Can you share the DWG file of micromixer design?

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